Header
| Growth ID | template1 |
| User Name | YichenGuo |
| Date | 03/04/2026 |
| time | 17:06:35 |
| Path | /home/yichen/Lehigh University Dropbox/Yichen Guo/PLD_Workflow |
| Chamber | PLD-3 TSST |
| Substrate | NSO (NdScO3) |
| Substrate Size | 2.5 cm * 2.5 cm |
| Cool Down Atmosphere | Oxygen |
Target 1
Target Parameters
| Target Material | PFW |
| Offset X (mm) | 0.0 |
| Offset Y (mm) | 0.0 |
| Scan Diameter (mm) | 23.0 |
| Scan Speed X/Z (mm/s) | 1.5 |
Heater Parameter
| Heater Position X (mm) | 3.0 |
| Heater Position Y (mm) | 0.0 |
| Heater Position Z (mm) | 6.0 |
| Tilt (deg) | 0.5 |
| Azimuth (deg) | -15.0 |
Laser and Mask
| Laser Voltage (kV) | 24.0 |
| Laser Energy (mJ) | 42.0 |
| Targeted Measured Energy (mJ) | 45.6 |
| Fluence (J/cm^2) | 2.2 |
Mask and Spot
| Mask Width (mm) | 15.0 |
| Mask Height (mm) | 4.0 |
| Mask Area (mm^2) | 60.0 |
| Spot Width (mm) | 0.93 |
| Spot Height (mm) | 2.46 |
| Spot Area (mm^2) | 2.28 |
| Magnification (x) | 6.1 |
Pre-annealing
| Pre-Annealing Temperature (°C) | 600.0 |
| Pre-Annealing Time (min) | 60.0 |
Ablation
| Pre-Ablation Pulses (count) | 0.0 |
| Ablation Temperature (°C) | 570.0 |
| Ablation Pressure (mTorr) | 250.0 |
| Ablation Atmosphere Gas | Oxygen |
| Ablation Frequency (Hz) | 2.0 |
| Ablation Pulses (count) | 1500.0 |